CHA e-beam Evaporator

Multi purpose PVD system

6 pocket electron beam evaporator

Up to 6 4 inch wafers

Materials: Al, Au, Cr, Ti, SiO₂

Edwards Auto 360 Thermal Evaporator

Multi purpose PVD system

Microprocessor controlled Evaporator

Metal : Al, Au, Cr, Ti,  Ni, Fe, Pt, Pd, Cu, Bi, Ag

Alloy : ZnSe, GeNi, AuGeNi

Denton Explorer 14 Sputter

Multi purpose PVD system

Two rf and one DC power sources

Targets available : Al, Ag Ti, Cu, SiO₂

Cressington 108A Carbon Coater

Carbon Coating for SEM