Electrical Engineering Advanced Sensors and Actuators Laboratory Menu Research Cleanroom Facility Deposition Lithography Etching Metrology Safety & User Information Contact Thin Film Deposition CHA e-beam Eavporator Edwards Auto 306 Thermal Evaporator Denton Explorer 14 Sputter Cressington 108A Carbon Coater Etching Technics 800 - II Dry Etcher Samco Reactive Ion Etcher Lithography Karl Suss MJB 3 Mask Aligner Solitec 5100 Spinner Edwards Auto 306 Thermal Evaporator Metrology Veeco Dektak 150 Surface Profiler WYKO Optical Interferometer 4 Point Probe